JPH038068Y2 - - Google Patents
Info
- Publication number
- JPH038068Y2 JPH038068Y2 JP14360285U JP14360285U JPH038068Y2 JP H038068 Y2 JPH038068 Y2 JP H038068Y2 JP 14360285 U JP14360285 U JP 14360285U JP 14360285 U JP14360285 U JP 14360285U JP H038068 Y2 JPH038068 Y2 JP H038068Y2
- Authority
- JP
- Japan
- Prior art keywords
- stator
- rotor
- machine frame
- liquid
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007788 liquid Substances 0.000 claims description 14
- 239000003921 oil Substances 0.000 claims description 3
- 229920002545 silicone oil Polymers 0.000 claims description 2
- 239000010723 turbine oil Substances 0.000 claims description 2
- 238000004804 winding Methods 0.000 description 10
- 238000001514 detection method Methods 0.000 description 7
- 238000002347 injection Methods 0.000 description 5
- 239000007924 injection Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 241000282465 Canis Species 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
Landscapes
- Motor Or Generator Frames (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14360285U JPH038068Y2 (en]) | 1985-09-20 | 1985-09-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14360285U JPH038068Y2 (en]) | 1985-09-20 | 1985-09-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6251943U JPS6251943U (en]) | 1987-03-31 |
| JPH038068Y2 true JPH038068Y2 (en]) | 1991-02-27 |
Family
ID=31053439
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14360285U Expired JPH038068Y2 (en]) | 1985-09-20 | 1985-09-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH038068Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011205878A (ja) | 2009-12-25 | 2011-10-13 | Canon Anelva Corp | 真空アクチュエータ及び基板搬送ロボット |
-
1985
- 1985-09-20 JP JP14360285U patent/JPH038068Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6251943U (en]) | 1987-03-31 |
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